A User's Guide to Vacuum Technology by John F. O'Hanlon

By John F. O'Hanlon

Within the decade and a part because the booklet of the second one version of A User?s consultant to hoover Technology there were many very important advances within the box, together with spinning rotor gauges, dry mechanical pumps, magnetically levitated rapid pumps, and ultraclean method designs. those, in addition to stronger cleansing and meeting concepts have made contamination-free production a fact. Designed to bridge the distance in either wisdom and coaching among designers and finish clients of vacuum gear, the 3rd variation bargains a pragmatic standpoint on today?s vacuum expertise. With a spotlight at the operation, knowing, and choice of kit for commercial approaches utilized in semiconductor, optics, packaging, and comparable coating applied sciences, A User?s consultant to hoover Technology, 3rd variation presents an in depth therapy of this crucial box. whereas emphasizing the basics and concerning major issues no longer properly lined somewhere else, the textual content avoids themes no longer suitable to the common person.

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For most surfaces, diffuse reflection at the wall is a good approximation; that is, each particle arrives, sticks, rattles around in a surface imperfection, and is re-emitted in a direction independent of its incident velocity. Thus there is a chance that a particle entering a pipe in which h >> d will not be transmitted, but will be returned to the entrance. In molecular flow, gas molecules do not collide with one another, and gases can flow in opposite directions without interaction. 01 the gas is neither viscous nor molecular.

32 to convert to units of Torr, or divide by 100 to convert to units of millibars. 3. 5x10-*Torr) ( 7 . 6~10~ 1 . 6~10-~ 6 . 6~10~ 2 . 83~10'~ 2 . 83~10'~ Particle density n; average molecular spacing d; mean free path I; and particle flux on a surface r, for T = 22°C. 1 for pressures ranging from atmospheric to ultrahigh vacuum. The pressure dependence of the mean free path is given for several gases in Appendix B. 1. 13), summarizes all the earlier experimentally determined gas laws. However, we review several of the experimentally verified laws here, because they are especially helpful to those with no experience in gas kinetics.

13. M. C. I. Siu, J. Vac. Sci. , 10,368 (1973). GAS PROPERTIES 24 PROBLEMS 2. I t State the assumptions that form the basis of kinetic theory. 2 Consider a 1-cm-diameter pipe 10 meters long. 01 Pa to lo5 Pa. (b) Knowing that the diffusion fiont moves as d2 oc Dt, estimate the time required for air to diffuse to the end of the 1O-meterlong pipe over the pressure range given in (a). 3 The diffbsion constant for gas (1) in gas (2), 0 1 2 describes how gas a gas of one molecular weight diffuses in the background of a second gas.

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