Handbook of Silicon Based MEMS Materials and Technologies by Markku Tilli, Veikko Lindroos, Veli-Matti Airaksinen, Sami

By Markku Tilli, Veikko Lindroos, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Ari Lehto, Teruaki Motooka

A accomplished consultant to MEMS fabrics, applied sciences and production, studying the cutting-edge with a selected emphasis on present and destiny applications.

Key themes lined include:

  • Silicon as MEMS material
  • Material homes and dimension techniques
  • Analytical equipment utilized in fabrics characterization
  • Modeling in MEMS
  • Measuring MEMS
  • Micromachining applied sciences in MEMS
  • Encapsulation of MEMS components
  • Emerging approach applied sciences, together with ALD and porous silicon

Written through seventy three international category MEMS individuals from all over the world, this quantity covers fabrics choice in addition to crucial technique steps in bulk micromachining, pleasurable the wishes of equipment layout engineers and approach or improvement engineers operating in production tactics. It additionally presents a accomplished reference for the economic R&D and educational groups.

  • Veikko Lindroos is Professor of actual Metallurgy and fabrics technology at Helsinki college of know-how, Finland.
  • Markku Tilli is Senior vp of analysis at Okmetic, Vantaa, Finland.
  • Ari Lehto is Professor of Silicon expertise at Helsinki college of know-how, Finland.
  • Teruaki Motooka is Professor on the division of fabrics technological know-how and Engineering, Kyushu collage, Japan.

• offers very important packaging applied sciences and approach wisdom for silicon direct bonding, anodic bonding, glass frit bonding, and similar techniques
• exhibits tips to safeguard units from the surroundings and reduce package deal dimension for dramatic aid of packaging costs
• Discusses homes, education, and development of silicon crystals and wafers
• Explains the various homes (mechanical, electrostatic, optical, etc), production, processing, measuring (incl. concentrated beam techniques), and multiscale modeling equipment of MEMS constructions

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Extra info for Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)

Example text

When the initial dislocation density increases, the effect of oxy­ gen diminishes and the upper yield strength falls. Thus, slipped wafers in thermal treatments (and especially in the cooling phase, where radial stresses in wafers are highest) are more susceptible to further slip with increasing initial dislocation content. It should be noted that silicon wafers in the as-received state typically do not have dislocations; exceptions are some epi wafer types with thick epitax­ ial layers. In these epi wafers, specifications allow some maximum amount of slip.

Also, those piezoresistors whose stress is purely compressive or tensile are affected by the vertical car­ rier profiles, as the greatest strains are located at the very surfaces of the membrane. On the other hand, the carrier concentrations tend to change more rap­ idly the closer they are to the surface. Because the car­ rier concentrations near the device surfaces can also be affected by charging of the dielectric layers used to isolate and seal the micromachined structures, a care­ ful consideration of the design principles used in ana­ log transistor design is necessary to ensure the reliable operation of the piezoresistive element.

The maximum relative resistivity change for a given applied force). 11) and have contributed to the dominance of bridge circuits in piezoresistive sensing based on silicon. 2. 13. The choices of resistor direction, dicing direction, and anisotropic etching are determined by the crystal orientations. In addition, the specification of the crystallographic location of the substrate wafer flat is based on the chosen crystal alignment. 13a, c. Linearity In comparison to many other physical phenomena, the piezoresistive effect is a fairly linear effect.

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